|HAO WANATHA MARIA DEL AUTHORTOTALT

US009759555B2

(12) United States Patent ( 10) Patent No.: US 9, 759,555 B2

Koren et al. (45 ) Date of Patent: Sep . 12 , 2017
(54 ) HIGH THROUGHPUT TRIANGULATION (56 ) References Cited
SYSTEM
U . S . PATENT DOCUMENTS
( 71 ) Applicant: CAMTEK LTD ., Migdal-Haemek (IL ) 5,243,405 A * 9/1993 Tichenor .............. GOIB 11 /303
( 72 ) Inventors: Shimon Koren, Haifa (IL ); Tomer 356 /600
Gilad, Kiryat Tivon (IL ) 2009/0012743 Al* 1/2009 McDonnell .......... GOIB 11/303
702 / 167
2010 /0128276 A1* 5 /2010 De Groot . ......... GO1B 11/ 2441
(73 ) Assignee : CAMTEK LTD ., Migdal Haemeq ( IL ) 356 /450
( * ) Notice : Subject to any disclaimer, the term of this
2014/0362208 A1* 12/2014 Koren ............ HO4N 13348
/0253
/ 87
patent is extended or adjusted under 35 * cited by examiner
U . S . C . 154 (b ) by 0 days.
Primary Examiner — Sunghee Y Gray
(21) Appl. No.: 15/158,665 (74 ) Attorney, Agent, or Firm — Reches Patents
(22) Filed : May 19 , 2016 ABSTRACT
(57 )
(65) Prior Publication Data A system for measuring heights ofmultiple structures of an
US 2017 /0010093 A1 Jan . 12 , 2017 object, the system may include an illumination module that
is configured to illuminate the object by a light strip that is
Related U . S. Application Data spatially incoherent; multiple cameras; a collection module
that is configured to collect light that is reflected from the
(60 ) Provisional application No. 62/190 ,266 , filed on Jul. object and to distribute the light to the multiple cameras ;
9 , 2015 . wherein the collection module has an elongated field of view
that has a longitudinal axis that is parallel to the light strip ;
(51) Int. Cl. wherein the multiple cameras are configured to generate ,
GOIB 11 /24 ( 2006 .01) during a height measurement process , detection signals
GOIB 11/25
se ?
???
(52) U . S . CI.
( 2006 .01)
CPC . ........ GO1B 11/2522 (2013.01); GOIB 11/25
indicative ofheights of the multiple structures; a mechanical
stage for introducing a movement, during the height mea
surement process, between the object and each one of the
(2013 .01) illumination module and the collection module ; and a pro
(58 ) Field of Classification Search cessor that is configured to process the detection signals to
CPC .......................... GO1B 11 /303 ; GO1B 11 /0608 determine the heights of the multiple structures.
USPC . . . . . .. . . . . . . ..... 356 /606
See application file for complete search history. 24 Claims, 6 Drawing Sheets

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 US 9 , 759, 555 B2
HIGH THROUGHPUT TRIANGULATION The system when operating in non - interlaced mode each
SYSTEM microscopic bump of the microscopic bumps is imaged by
a plurality of cameras of the multiple cameras .
RELATED APPLICATIONS According to an embodiment of the invention there may
5 be provided a method for measuring heights of multiple
This application claims the priority of U . S . provisional structures of an object. The method may include illuminat
patent Ser. No. 62/ 190 ,266 filing date Jul. 9 , 2015 which is ing , by an illumination module of an inspection system , the
incorporated herein by reference . object by a light strip that is spatially incoherent, collecting ,
by a collection module , light that is reflected from the object
BACKGROUND OF THE INVENTION and distributing the light to multiple cameras, wherein the
collection module has an elongated field of view that has a
A triangulation system may use a general purpose camera longitudinal
and illuminate an object with a single line of light. An axis that is parallel to the light strip , generating ,
example of a triangulation system is provided in U . S . Pat. by the multiple cameras , during a height measurement
15 process
No . 8 ,363 ,229 of Ben -Levi teaches a triangulation system 15 tiple , detection signals indicative of heights of the mul
P. structures
and is incorporated herein by reference . , introducing a movement, by a mechanical
The throughput of the triangulation system is limited by stage and during the heightmeasurement process , between
up to date area camera performance (on one side ) and optical the object and each one of the illumination module and the
FOV limitation (on the other side ). collection module and processing, by a processor, the detec
Given the above, it is not feasible to extend the throughput 20 tion signals to determine the heights of the multiple struc
of the triangulation system without scarifying optical per tures .
formances or implementing super- expensive custom camera During the height measurement process , fields of view of
design . different cameras of themultiple cameras cover the multiple
structures of an object in an interlaced manner.
SUMMARY 25 During the height measurement process , fields of view of
different cameras of the multiple cameras cover themultiple
According to an embodiment of the invention there may structures of an object in an non - interlaced manner.
be provided a system for measuring heights of multiple The method may include configuring the inspection sys
structures of an object, said system may include an illumi
nation module that is configured to illuminate the object by 30 modeto, wherein
tem operate in an interlaced mode or in a non - interlaced
when operating in the interlaced mode fields
a light strip that is spatially incoherent, multiple cameras , a of view of different cameras of the multiple cameras cover
collection module that is configured to collect light that is the multiple structures of an object in an interlaced manner
reflected from the object and to distribute the light to the
multiple cameras , wherein the collection module has an and wherein when operating in the non - interlaced mode the
elongated field of view that has a longitudinal axis that is 35 fields
1 of view of different cameras of the multiple cameras
parallel to the light strip , wherein the multiple cameras are cover the multiple structures of an object in a non -interlaced
configured to generate , during a height measurement pro manner.
cess, detection signals indicative of heights of the multiple During the heightmeasurement process , differentcameras
structures , a mechanical stage for introducing a movement of the multiple cameras exhibit different focus conditions.
during the height measurement process, between the object 40 During the height measurementprocess, different cameras
and each one of the illumination module and the collection of the multiple cameras are configured to obtain information
module and a processor that is configured to process the from different heights .
detection signals to determine the heights of the multiple The multiple structures are microscopic bumps .
structures . When operating in an interlaced mode each microscopic
During the heightmeasurement process, fields of view of 45 bump of the microscopic bumps is imaged by up to a single
different cameras of the multiple cameras cover the multiple camera of the multiple cameras .
structures of an object in an interlaced manner . When operating in non - interlaced mode each microscopic
During the heightmeasurement process, fields of view of bump of the microscopic bumps is imaged by a plurality of
different cameras of the multiple cameras cover the multiple cameras of the multiple cameras .
structures of an object in an non - interlaced manner. 50
The system is configured to operate in an interlaced mode BRIEF DESCRIPTION OF THE INVENTION
or in a non -interlaced mode, wherein when operating in the
interlaced mode fields of view of different cameras of the The present invention will be understood and appreciated
multiple cameras cover the multiple structures of an object more fully from the following detailed description taken in
in an interlaced manner and wherein when operating in the 55 conjunction with the drawings in which :
non - interlaced mode the fields of view of different cameras FIG . 1 illustrates a triangulation system and an object
of the multiple cameras cover the multiple structures of an according to an embodiment of the invention ;
object in a non -interlaced manner. FIG . 2 illustrates the object and illumination and collected
During the height measurement process , different cameras beams according to an embodiment of the invention ;
of the multiple cameras exhibit different focus conditions. 60 FIG . 3 illustrates the object and multiple light strips
During the heightmeasurement process , different cameras according to an embodiment of the invention ;
of the multiple cameras are configured to obtain information FIG . 4 is a timing diagram according to an embodiment
from different heights. of the invention ;
The multiple structures are microscopic bumps . FIG . 5 illustrates a triangulation system and an object
The system , when operating in an interlaced mode each 65 according to an embodiment of the invention ; and
microscopic bump of the microscopic bumps is imaged by FIG . 6 illustrates a method according to an embodiment
up to a single camera of the multiple cameras. of the invention .
 US 9, 759,555 B2
DETAILED DESCRIPTION OF THE processes for compensating between differences between
INVENTION light generated by different illumination modules .
FIG . 1 also illustrates the collection module 30 as includ
Because the apparatus implementing the present inven ing an objective lens 32 that is followed by a tube lens 34
tion is , for the most part, composed of optical components 5 that is followed by a beam splitter 42 for splitting collected
and circuits known to those skilled in the art, circuit details
will not be explained in any greater extent than that con beam 120 to two beams 130 and 140 that are directed to first
and second cameras respectively . Triangulation system 10
sidered necessary as illustrated above , for the understanding
ng may include other collection units .
and appreciation of the underlying concepts of the present
invention and in order not to obfuscate or distract from the 10 100FIG, the. 2illumination
includes a top view and a side view of the object
beam 110 , the lightstrip 115 formed on
teachings of the present invention . the object and the collected beam 120 according to an
In the following specification , the invention will be embodiment of the invention .
described with reference to specific examples of embodi FIG . 2 illustrates that the collection module 30 has a
ments of the invention . It will, however, be evident that ein 1515 collection field of view (FOV collection ) 420 that is elon
various modifications and changes may be made therein CON
without departing from the broader spirit and scope of the gated , has a length ( 320 ) that is parallel to the longitudinal
invention as set forth in the appended claims. axis of the light strip 115 and a width (220 ) that is perpen
There is provided a high throughput triangulation system . dicular to the longitudinal axis of the light strip 115 . Accord
The collection path of the triangulation system may include de ingly — the collection module 30 collects light reflected
distribution optics such as one or more beam splitters for 20 within a narrow angular range.
distributing collected light between two or more cameras FIG . 2 illustrates that the illumination module 20 has a
and their corresponding optics. illumination field of view ( FOV illumination ) 410 that is
FIG . 1 illustrates a triangulation system 10 according to elongated, has a length ( 310 ) that is parallel to the longitu
an embodiment of the invention . dinal axis of the light strip 115 and a width (210 ) that is
Triangulation system 10 includes illumination module 20 , 25 perpendicular to the longitudinal axis of the light strip 115 .
collection module 30 , multiple cameras such as first camera Accordingly — the illumination module 20 illuminates the
54 that is preceded by first camera optics 52 and second object over a narrow angular range.
camera 62 that is preceded by second camera optics 64 , FIG . 2 also illustrates an example of a scan pattern 141
mechanical
m stage 14 , frame grabbers 56 and 66 as well as that is followed by mechanical stage 14 . Other scan patterns
processor 90 . may be provided .
Illumination module 20 is configured to illuminate the Triangulation system 10 may operate in an interlaced
object 100 with illuminating beam 110 to form on the object mode or in a non -interlaced mode.
100 a light strip (denoted 115 in FIG . 2 ) that is spatially FIG . 3 illustrates lights stripes formed on the object 100
incoherent. The object 100 includes a surface (denoted 101
in FIG . 2 ) and multiple structures such as but not limited140to 3535 atal different points in time.
When operating in an interlaced mode a Line/Step “ even ”
microscopic bumps (denoted 102 in FIG . 2 ). The illumina
tion is done from a non -normal illumination angle . (light reflected from light strips 116 ) is captured by first
Collection module 30 is configured to collect light that is camera 54 and Line /Step “ odd ” (light reflected from light
reflected from the object and to distribute the light to strips 115 ) is captured by second camera 64 . There may be
multiple cameras . 40 a slight overlap between the odd and even lines/steps in
The first and second cameras 54 and 64 are configured to order to compensate for mechanical inaccuracies and /or
generate , during a height measurement process , detection other system inaccuracies or errors to prevent gaps in the
signals indicative of heights of the multiple structures . image.
Mechanical stage 14 is configured to introduce a move- In the interlaced mode the throughput of the triangulation
ment, during the heightmeasurement process, between the 45 system is doubled in comparison to a single camera trian
surface and each one of the illumination module 20 and the gulation system .
collection module 30 . When operating in an interlaced mode the system (pro
Frame grabbers 56 and 66 are configured to obtain the cessor 90 and / or frame grabbers 56 and 66 ) reconstruct a
detection signals from the cameras and generate first camera continuous frame from odd / even steps applying dedicated
frames and second camera frames . 50 system calibration ( to match cameras ). While each camera is
Processor 90 is configured to process the frames to operating at given rate ( frames per second FPS ), the system
determine the heights of the multiple structures . The pro - actual speed is doubled to 2 * FPS . This is illustrated in the
cessing may include applying any known triangulation pro - timing diagrams of FIG . 4 ).
cess. For example — the processor may apply the triangula - FIG . 4 illustrates the pulses 501 used to trigger an image
tion process illustrated in U . S . Pat. No. 8, 363,229 of Ben - 55 capture of the first camera 54 and the pulses 502 used to
Levi. Processor 90 may include one or more general purpose trigger an image capture of the second camera 54 .
unit chips or cores, one or more image processor chips or The cycle (1 /FPS ) of the first camera is denoted 503 . The
cores, one ormore FPGAs, one or more computers , and the cycle ( 1 /FPS ) of the second camera is denoted 504 . The
like. combined cycle ( 1/FPS of both cameras ) is denoted 505 and
FIG . 1 illustrates the illumination module 20 as including 60 is one half of the first and second cameras cycles .
a fiber 22 for feeding light to a Scheimpflug principle According to an embodiment of the invention the trian
illumination module 24. Triangulation system 10 may gulation system 10 may operate in a non - interlaced manner.
include other illumination units . Triangulation system 10 In this mode the cameras image the same areas and are used
may include one or multiple illumination units although to increase the accuracy of the triangulation process or
using a single illumination unit reduced the cost of the 65 otherwise obtain more information about the object. In this
triangulation system and prevents the creation of interfer - mode each light strip is captured twice by first camera 54
ence patterns, cross talks and prevents using compensations and by second camera 64 .
 US 9, 759,555 B2
The processor 90 may reconstruct frames from double - to generate (during the repetitions of step 640 ) detection
information . The process reduce the noise and improve the signals indicative of the heights of the multiple structures .
triangulation system precision without sacrificing speed S tep 640 is followed by step 650 of processing, by a
FPS . processor, the detection signals to determine the heights of
Both modes may differ from each other by software 5 the multiple structures .
programming synchronization only . Thus — the triangulation Step 650 may be repeated multiple times (processing the
system 10 may switch between the modes. outcome of illuminating a feature with a single light strip ) of
It has been found that when in dual camera configuration , be executed once per multiple repetitions of steps 620 , 630
when the throughput increase is fully utilized ( x2 ), the and 640 .
mechanical stage speed is doubled and so is the distance on 10 Method 600 may include (not shown ) reconstructing
the wafer traveled by the line during exposure . frames from the detection signals and sending the frames to
In order to maintain light intensity the exposure needs to a processor — to be processed by the processor.
be doubled . The overall effect is that at dual camera con Method 600 can be applied when the triangulation system
figuration the stage travels 4 times the distance traveled at operated in an interlaced mode and / or when operating in a
present configuration during exposure . 15 non - interlaced mode.
Experiments showed that scan results are independent of Furthermore, those skilled in the art will recognize that
the exposure time. This is expected when the step size is boundaries between the functionality of the above described
smaller than the width of the line . Since step size is usually operations are merely illustrative. The functionality of mul
5 um or below , and bumps become smaller, this issue should tiple operations may be combined into a single operation ,
not raise difficulties . 20 and /or the functionality of a single operation may be dis
According to an embodiment of the invention when tributed in additional operations. Moreover, alternative
operating in a non - interlaced mode the first and second embodiments may include multiple instances of a particular
cameras 54 and 64 may be configured to different focus operation , and the order of operations may be altered in
conditions so that the focal planes of these cameras differ various other embodiments .
from each other and the first and second cameras obtain 25 Thus , it is to be understood that the architectures depicted
information about areas of the object that are located at herein are merely exemplary , and that in fact many other
different height. architectures can be implemented which achieve the same
It is noted that the triangulation may have more than two functionality . In an abstract, but still definite sense , any
cameras. For exampleFIG . 5 illustrates a triangulation arrangement of components to achieve the same function
system 11 that has three cameras. In comparison to trian - 30 ality is effectively “ associated ” such that the desired func
gulation system 10 of FIG . 1 — triangulation system 11 tionality is achieved . Hence , any two components herein
includes an additional beam splitter 44 , third camera optics combined to achieve a particular functionality can be seen as
72 , third camera 74 and third frame grabber 76 . Additional “ associated with ” each other such that the desired function
beam splitter 44 and beam splitter 42 split the collected ality is achieved , irrespective of architectures or intermedial
beam 120 to light beams 130 , 140 and 150 that are collected 35 components . Likewise, any two components so associated
by first, second, third cameras optics (52, 62 and 72 ) that are can also be viewed as being " operably connected ,” or
followed by first, second and third cameras 54, 64 and 74 " operably coupled ,” to each other to achieve the desired
and first, second and third image frame grabbers 56 , 66 and functionality .
76 respectively . However, other modifications, variations , and alternatives
The number of cameras per triangulation system may 40 are also possible. The specifications and drawings are ,
exceed three . accordingly , to be regarded in an illustrative rather than in a
FIG . 6 illustrates method 600 according to an embodi- restrictive sense .
ment of the invention . The word " comprising” does not exclude the presence of
Method 600 may start by steps 610 and 620. other elements or steps then those listed in a claim . It is
Step 620 may include illuminating, by an illumination 45 understood that the terms so used are interchangeable under
module , the object by a light strip that is spatially incoherent appropriate circumstances such that the embodiments of the
Step 620 may be followed by step 630 of collecting , by a invention described herein are , for example , capable of
collection module , light that is reflected from the object and operation in other orientations than those illustrated or
distributing the light to multiple cameras. The collection otherwise described herein .
module has an elongated field of view that has a longitudinal 50 Furthermore , the terms “ a ” or “ an ," as used herein , are
axis that is parallel to the light strip . defined as one or more than one. Also , the use of introduc
Step 640 may be followed by generating, by themultiple tory phrases such as “ at least one ” and “ one ormore ” in the
cameras , detection signals indicative of a height of a struc- claims should not be construed to imply that the introduction
ture illuminated by the light strip . of another claim element by the indefinite articles “ a ” or
Steps 620 , 630 and 640 are executed multiple times, 55 " an " limits any particular claim containing such introduced
during a height measurement process . claim element to inventions containing only one such ele
Step 610 is executed in parallel to step 620 , 630 and 640 . ment, even when the same claim includes the introductory
Step 610 includes introducing a movement, by a mechani - phrases “ one or more ” or “ at least one” and indefinite
cal stage and during the height measurement process , articles such as “ a ” or “ an .” The same holds true for the use
between he object and each one of the illumination module 60 of definite articles . Unless stated otherwise , terms such as
and the collection module . " first” and “ second ” are used to arbitrarily distinguish
The movement introduced in step 610 (in parallel to steps between the elements such terms describe.
620, 630 and 640 ) causes the light strip to impinge (during Thus, these terms are not necessarily intended to indicate
the repetitions of step 620 ) on the multiple features (at temporal or other prioritization of such elements . The mere
differentpoints in time) of the object, to collect light (during 65 fact that certain measures are recited in mutually different
the repetitions of step 630 ) reflected from the multiple claims does not indicate that a combination of these mea
features and distribute the light to the multiple cameras and sures cannot be used to advantage.
 US 9,759 ,555 B2
We claim : structures of the object by the light strip and to prevent the
1. A system for measuring heights of multiple structures creation of interference patterns.
of an object, said system comprising: 12 . A method for measuring heights ofmultiple structures
an illumination module that is configured to illuminate the of an object, the method comprises:
multiple structures of the object by a light strip that is 5 illuminating, by an illumination module of an inspection
spatially incoherent; system , the multiple structures of the object by a light
multiple cameras; strip that is spatially incoherent;
a collection module that is configured to collect light that collecting , by a collection module, light that is reflected
is reflected from the multiple structures of the object from the multiple structures of the object and distrib
and to distribute the light to the multiple cameras; 10 uting the light to multiple cameras ; wherein the col
wherein the collection module has an elongated field of lection module has an elongated field of view that has
view that has a longitudinal axis that is parallel to the a longitudinal axis that is parallel to the light strip ;
light strip ; generating, by the multiple cameras, based on the light
wherein the multiple cameras are configured to generate , that is reflected from the multiple structures of the
based on the light that is reflected from the multiple 15 object and during a height measurement process, detec
structures of the object and during a height measure tion signals indicative of heights of the multiple struc
ment process , detection signals indicative ofheights of tures ;
the multiple structures ; introducing a movement, by a mechanical stage and
a mechanical stage for introducing a movement, during during the height measurement process, between the
the height measurement process , between the object 20 object and each one of the illumination module and the
and each one of the illumination module and the collection module; and
collection module ; and processing, by a processor, the detection signals to deter
a processor that is configured to process the detection mine the heights of the multiple structures .
signals to determine the heights of the multiple struc 13 . The method according to claim 12 wherein during the
tures . 25 height measurement process , fields of view of different
2 . The system according to claim 1 wherein during the cameras of the multiple cameras cover the multiple struc
height measurement process, fields of view of different tures of object in an interlaced manner.
cameras of the multiple cameras cover the multiple struc - 14 . The method according to claim 13 wherein the fields
tures of the object in an interlaced manner. of view of the different cameras of the multiple cameras
3 . The system according to claim 2 wherein the fields of 30 partially overlap .
view of the different cameras of the multiple cameras 15 . The method according to claim 13 further comprising
partially overlap . reconstructing a continuous frame that spans over the fields
4 . The system according to claim 1 wherein during the of view of the different cameras of the multiple cameras.
height measurement process , fields of view of different 16 . The method according to claim 13 wherein at least one
cameras of the multiple cameras cover the multiple struc - 35 of the processor and a frame grabber of the system are
tures of the object in a non -interlaced manner . configured to reconstruct a continuous a frame that spans
5 . The system according to claim 1 wherein the system is over the fields of view of the different cameras of the
configured to operate in an interlaced mode or in a non multiple cameras.
interlaced mode; 17 . The method according to claim 12 wherein during the
wherein when operating in the interlaced mode fields of 40 height measurement process , fields of view of different
view of different cameras of the multiple cameras cover cameras of the multiple cameras cover the multiple struc
the multiple structures of an object in an interlaced tures of the object in a non - interlaced manner.
manner ; 18 . The method according to claim 12 comprising con
and wherein when operating in the non - interlaced mode figuring the inspection system to operate in an interlaced
the fields of view of different cameras of the multiple 45 mode or in a non - interlaced mode;
cameras cover the multiple structures of an object in a wherein when operating in the interlaced mode fields of
non - interlaced manner . view of different cameras ofthe multiple cameras cover
6 . The system according to claim 1 wherein during the the multiple structures of an object in an interlaced
height measurement process , different cameras of the mul manner; and
tiple cameras have focal planes that differ from each other. 50 wherein when operating in the non - interlaced mode the
7. The system according to claim 1 wherein during the fields of view of different cameras of the multiple
height measurement process, different cameras of the mul cameras cover the multiple structures of an object in a
tiple cameras are configured in a differentmanner from each non - interlaced manner.
other to obtain information from areas of the object that are 19 . The method according to claim 12 wherein during the
located at different heights . 55 heightmeasurement process , different cameras of the mul
8 . The system according to claim 1 wherein the multiple tiple cameras have focal planes that differ from each other.
structures are microscopic bumps . 20 . The method according to claim 12 wherein during the
9 . The system according to claim 8 wherein when oper - height measurement process, different cameras of the mul
ating in an interlaced mode each microscopic bump of the tiple cameras are configured in a differentmanner from each
microscopic bumps is imaged by up to a single camera of the 60 other to obtain information from areas of the object that are
multiple cameras. located at different heights.
10 . The system according to claim 8 wherein when 21 . The method according to claim 12 wherein the mul
operating in non -interlaced mode each microscopic bump of tiple structures are microscopic bumps .
the microscopic bumps is imaged by a plurality of cameras 22 . The method according to claim 21 wherein when
of the multiple cameras. 65 operating in an interlaced mode each microscopic bump of
11 . The system according to claim 1 wherein the illumi- the microscopic bumps is imaged by up to a single camera
nation module is configured to illuminate the multiple of the multiple cameras .
 US 9 ,759,555 B2
23 . The method according to claim 21 wherein when
operating in non - interlaced mode each microscopic bump of
the microscopic bumps is imaged by a plurality of cameras
of the multiple cameras .
24 . The method according to claim 12 wherein the illu - 5
minating, by the illumination module , the multiple struc
tures of the object by the light strip comprises preventing a
creation of interference patterns.
* * * * *
.